Inconsistency between SEM image and Crystal orientation data obtained by SEM-EBSD systems and the solution

We confirmed the systematic inconsistency between SEM images and crystal orientations obtained by HKL channel 5 (Flamenco, Oxford Instruments). The orientation shown by HKL channel 5 was just consistent with the SEM image rotated by 180 degree around the sample normal direction. We present this problem and the procedures to confirm the inconsistency in your EBSD-SEM systems in the following PDF file,

"Akira Miyake, Aki Takigawa, Yohei Igami, Shugo Ohi, Ryuta Nakamura, Akira Tsuchiyama: Inconsistency between SEM image and Crystal orientation data obtained by SEM-EBSD systems, JpGU 2016, MP43-P05"

We also propose a solution for this problem in the PDF file below. We confirm to obtain the consistent orientation relationship between SEM images and the crystal orientations obtained by the standard-EBSD and transmission-EBSD (t-EBSD/TKD) by changing the setting parameters of 'sample tilt' and 'detector orientation'.

"Akira Miyake, Yohei Igami and Aki Takigawa, Solution of inconsistency between SEM image and Crystal orientation data obtained by SEM-EBSD systems, JAMS 2016"

These parameters are not official opinion of Oxford instruments.

Akira MIYAKE, 2016/5/25 (last update 2016/6/18)